Semi Automatic Probe Station

Nederlandse organisatie voor Toegepast-Natuurwetenschappelijk Onderzoek TNO

The Radar Technology group within TNO, designs and analyses complex MMICs. In order to achieve our goals, the Radar Technology group has a measurement facility for characterizing individual test structures and analysing the designed MMICs on-wafer. The measurements are performed on 3 independent, semi-automatic probe-stations. These probe stations have 200 mm, temperature controlled, chucks and are used 25 % of the time for automated stepped measurements and 75 % of the time for single chip analysis. These chips may be bare dies placed on the chuck or mounted on a carrier or package.
The goal for 2017 is to replace an older probe station with a new one with a larger (300 mm) chuck in order to handle the wafer sizes in the future. Also, possibilities have to be included for mounting high frequency mixers and/or impedance tuners on the probe arms in order to minimize cable movement and lower the losses in the measurement system.

Deadline
De termijn voor de ontvangst van de offertes was 2017-04-10. De aanbesteding werd gepubliceerd op 2017-02-28.

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Aankoopgeschiedenis
Datum Document
2017-02-28 Aankondiging van een opdracht
2017-05-10 Award Aankondiging