UHV-compatible dual-beam facility for nanofabrication and characterization for Eindhoven University of Technology
The whole project consists of 2 phases. Phase 1 consists of the realization of a new cluster tool for UHV deposition and in-situ analysis, and, directly coupled to that via a vibration separation unit, a system for 4-probe STM/AFM. The system will be used for research in the fields of nano-electronics, spintronics, nano-manufacturing/nano-materials, (photo)catalysis, and possibly others.
The present Tender aims at phase 2 of the project, which consist of the implementation of an additional UHV facility for in-situ UHV compatible focused electron beam and focused ion beam investigations, and directly attaching the facility to the equipment implemented within phase 1. The system should be capable of high-resolution SEM, chemical analysis using nanoSAM, magnetic imaging using SEMPA, deposition using FEBID/FIBID, and FIB milling and manipulation. The whole system should be compatible with respect to transfer of samples.
Deadline
De termijn voor de ontvangst van de offertes was 2013-09-03.
De aanbesteding werd gepubliceerd op 2013-07-18.
Leveranciers
De volgende leveranciers worden genoemd in gunningsbesluiten of andere aanbestedingsdocumenten:
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Aankoopgeschiedenis
| Datum |
Document |
| 2013-07-18
|
Aankondiging van een opdracht
|
| 2014-06-27
|
Award Aankondiging
|