Delivery of a ultra high resolution electron BEAM lithography workstation

The Netherlands Organisation for Applied Scientific Research TNO

TNO works in high class cleanrooms on several subjects strongly related to nanotechnology. One of the subjects is nanofabrication and scanning electron microscope (SEM) inspection of structures and/or devices on several substrates. Owing to further technological developments TNO intents to invest in an ultra high resolution electron beam lithography workstation which is capable of fabrication and investigation of best in class structures and devices.

Deadline

De termijn voor de ontvangst van de offertes was 2012-05-10. De aanbesteding werd gepubliceerd op 2012-03-29.

Leveranciers

De volgende leveranciers worden genoemd in gunningsbesluiten of andere aanbestedingsdocumenten:

• Raith GmbH

Wie?

• The Netherlands Organisation for Applied Scientific Research TNO

Wat?

• Laboratoriuminstrumenten, optische en precisie-instrumenten (uitgezonderd brillen)

Waar?

• Zuid-Holland › Delft en Westland

Aankoopgeschiedenis

Datum	Document
2012-03-29	Aankondiging van een opdracht
2013-01-08	Award Aankondiging

Aankondiging van een opdracht (2012-03-29)
Object
Toepassingsgebied van de aanbesteding
Titel: Laboratoriuminstrumenten, optische en precisie-instrumenten (uitgezonderd brillen)
Aankondigingsmetadata
Originele taal: Engels 🗣️
Documenttype: Aankondiging van een opdracht
Aard van de opdracht: Leveringen
Regelgeving: Europese Unie, met GPA-deelname
Gemeenschappelijke woordenlijst overheidsopdrachten (CPV)
Code: Laboratoriuminstrumenten, optische en precisie-instrumenten (uitgezonderd brillen) 📦

Procedure
Type procedure: Openbare procedure
Type bod: Inschrijving voor alle percelen
Gunningscriteria
Laagste prijs

Aanbestedende dienst
Identiteit
Land: Nederland 🇳🇱
Type aanbestedende dienst: Publiekrechtelijke instelling
Naam aanbestedende dienst: The Netherlands Organisation for Applied Scientific Research TNO
Postadres: PO Box 6060
Postcode: 2600 JA
Poststad: Delft
Contact
E-mail: gert.schenkel@tno.nl 📧
Telefoon: +31 88-8666433 📞

Referentie
Datums
Verzenddatum: 2012-03-29 📅
Indieningstermijn: 2012-05-10 📅
Publicatiedatum: 2012-04-03 📅
Identificatoren
Aankondigingsnummer: 2012/S 65-106020
PB-S nummer: 65

Object
Toepassingsgebied van de aanbesteding
Korte beschrijving:

Beschrijving van de opties:

Electron optics system: Everhart Thornley SE Detector and highest efficiency on-axis SE1 Detector.

Scan Generator: upgrade to 10 MHz pattern generator.

Software: master users advanced exposure software including multi-directional patterning modes (e.g. angle, transversal, longitudinal, concentric, raster and submodes), macro editor, script control and column parameter access.

Warranty: extended warranty for a period of 3 or 5 years.

Juridische, economische, financiële en technische informatie
Voorwaarden voor deelname
Geschiktheid om de beroepsactiviteit uit te oefenen:

— Declaration of integrity,

— Copy of an excerpt from the commercial register of the Chamber of Commerce.

Minimumeisen:

— The tenderer must prove that he is adequately insured against statutory liability and against business liability. The tenderer must demonstrate this by including a statement (policy) from his insurers signed in a legally valid way in his tender. The policy must be recent, not older than one (1) year, state, among other things, the minimum sum insured and must in any case permit the maximum payment twice per year. The cover provided in the insurance policy must be at least 2 000 000, EUR per incident and the policy provisions must allow payment for at least two incidents per year.

The tenderer must remain insured in this way during the performance of the agreement.

— In accordance with Article 48, paragraph 1, subparagraph c of the BAO, the tenderer must submit details of his consolidated turnover from which it can be demonstrated that the tenderer has achieved an annual turnover over the last three (3) years of at least 2 000 000 EUR (exclusive of BTW, Dutch VAT). Turnover details must be provided using the template given in Appendix 9.

TNO can request the tenderer provide an audit opinion verifying that the details are accurately represented.

Combines must meet this requirement jointly. All participants in a combine must fill in and sign for this information separately.

— An overview of three references regarding contracts of similar scope and content during the last three years or still on-going for the division or office that will be responsible for supply and development. Each reference should include the company name, the name and telephone number of the contact person and a (brief) description of the assignment. The overview must demonstrably show the tenderer's skills, efficiency and experience,

— Tenderer must include a list of at least 10 successful European installations for electron beam lithography tools based on a laser interferometer stage (based on a frequency stabilized HeNe laser). Besides demonstrating a broad range of users of this particular machine, TNO wants a few of these owners can consult as a reference, if needed,

— Tenderer has to have an own application lab, longer than 5 years, with dedicated ultra high resolution electron beam lithography workstation. The starting point is the delivery of an integrated system where the provider itself the whole setup of the machine invented, built and tested.

Procedure
Geldigheidsduur van de inschrijving: 60 dagen
Datum opening inschrijvingen: 2012-05-10 📅
Talen
Taal: Nederlands 🗣️
Engels 🗣️

Aanbestedende dienst
Contact
Contactpunt: TNO Finance & Facilities, Section Corporate Procurement
G. Schenkel

Referentie
Datums
Startdatum: 2012-06-16 📅
Einddatum: 2012-12-16 📅

Aanvullende informatie
Beoordelingsorgaan
Land: Nederland 🇳🇱
Bron: OJS 2012/S 065-106020 (2012-03-29)

Award Aankondiging (2013-01-08)
Object
Aankondigingsmetadata
Documenttype: Award Aankondiging

Procedure
Type bod: Niet van toepassing

Aanbestedende dienst
Contact
Telefoon: +31 888666433 📞

Referentie
Datums
Verzenddatum: 2013-01-08 📅
Publicatiedatum: 2013-01-09 📅
Identificatoren
Aankondigingsnummer: 2013/S 006-006122
Verwijst naar aankondiging: 2012/S 65-106020
PB-S nummer: 6

Object
Toepassingsgebied van de aanbesteding
Referentienummer: 2012 F&F/INK04

Gunning van het contract
Datum van sluiting van de overeenkomst: 2012-11-20 📅
Naam: Raith GmbH
Postadres: Konrad-Adenauer-Allee 8
Poststad: Dortmund
Postcode: 44263
Land: Nederland 🇳🇱
Informatie over aanbestedingen
Aantal ontvangen offertes: 1
Bron: OJS 2013/S 006-006122 (2013-01-08)

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