Delivery of a ultra high resolution electron BEAM lithography workstation
TNO works in high class cleanrooms on several subjects strongly related to nanotechnology. One of the subjects is nanofabrication and scanning electron microscope (SEM) inspection of structures and/or devices on several substrates. Owing to further technological developments TNO intents to invest in an ultra high resolution electron beam lithography workstation which is capable of fabrication and investigation of best in class structures and devices.
Deadline
De termijn voor de ontvangst van de offertes was 2012-05-10.
De aanbesteding werd gepubliceerd op 2012-03-29.
Leveranciers
De volgende leveranciers worden genoemd in gunningsbesluiten of andere aanbestedingsdocumenten:
Wie?
Wat?
Waar?
Aankoopgeschiedenis
| Datum |
Document |
| 2012-03-29
|
Aankondiging van een opdracht
|
| 2013-01-08
|
Award Aankondiging
|